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1

Components for high speed atomic force microscopy

Georg E. Fantner, Georg Schitter, Johannes H. Kindt, Tzvetan Ivanov, Katarina Ivanova, Rohan Patel, Niels Holten-Andersen, Jonathan Adams, Philipp J. Thurner, Ivo W. Rangelow, Paul K. Hansma

Journal:

Ultramicroscopy

Année:

2006

Langue:

english

Fichier:

PDF, 582 KB

english, 2006

2

Nanolithography by scanning probes on calixarene molecular glass resist using mix-and-match lithography

Kaestner, Marcus, Hofer, Manuel, Rangelow, Ivo W.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2013

Langue:

english

Fichier:

PDF, 8.75 MB

english, 2013

3

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Alternative Lithographic Technologies II - Nanoprobe maskless lithography

Rangelow, Ivo W., Ivanov, Tzvetan, Sarov, Yanko, Schuh, Andreas, Frank, Andreas, Hartmann, Hans, Zöllner, Jens-Peter, Olynick, Dierdre L., Kalchenko, V., Herr, Daniel J. C.

Année:

2010

Langue:

english

Fichier:

PDF, 3.50 MB

english, 2010

4

High-throughput process chain for single electron transistor devices based on field-emission scanning probe lithography and Smart Nanoimprint lithography technology

Lenk, Claudia, Krivoshapkina, Yana, Hofmann, Martin, Lenk, Steve, Ivanov, Tzvetan, Rangelow, Ivo W., Ahmad, Ahmad, Reum, Alexander, Holz, Mathias, Glinsner, Thomas, Eibelhuber, Martin, Treiblmayr, Dom

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2019

Langue:

english

Fichier:

PDF, 5.69 MB

english, 2019

5

Profile simulation model for sub-50 nm cryogenic etching of silicon using SF6/O2 inductively coupled plasma

Ishchuk, Valentyn, Olynick, Deirdre L., Liu, Zuwei, Rangelow, Ivo W.

Journal:

Journal of Applied Physics

Année:

2015

Langue:

english

Fichier:

PDF, 3.00 MB

english, 2015

6

Field-emission scanning probe lithography tool for 150 mm wafer

Holz, Mathias, Guliyev, Elshad, Ahmad, Ahmad, Ivanov, Tzvetan, Reum, Alexander, Hofmann, Martin, Lenk, Claudia, Kaestner, Marcus, Reuter, Christoph, Lenk, Steve, Rangelow, Ivo W., Nikolov, Nikolay

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2018

Langue:

english

Fichier:

PDF, 7.39 MB

english, 2018

7

[IEEE 2019 IEEE International Conference on Mechatronics (ICM) - Ilmenau, Germany (2019.3.18-2019.3.20)] 2019 IEEE International Conference on Mechatronics (ICM) - Active Cantilevers with Diamond-Tip for Field Emission Scanning Probe Lithography and Imaging

Hofmann, Martin, Mechold, Stephan, Holz, Mathias, Ahmad, Ahmad, Ivanonv, Tzvetan, Rangelow, Ivo W.

Année:

2019

Langue:

english

Fichier:

PDF, 1.28 MB

english, 2019

8

Chromium nano-width ribbons by standard lithography and wet etching

Michal Zaborowski, Piotr Grabiec, Ivo W. Rangelow

Journal:

Microelectronic Engineering

Année:

2004

Langue:

english

Fichier:

PDF, 453 KB

english, 2004

9

Increased imaging speed and force sensitivity for bio-applications with small cantilevers using a conventional AFM setup

Michael Leitner, Georg E. Fantner, Ernest J. Fantner, Katerina Ivanova, Tzvetan Ivanov, Ivo Rangelow, Andreas Ebner, Martina Rangl, Jilin Tang, Peter Hinterdorfer

Journal:

Année:

2012

Langue:

english

Fichier:

PDF, 1.07 MB

english, 2012

10

ViPER: simulation software for high aspect ratio plasma etching of silicon

Ishchuk, Valentyn, Volland, Burkhard E., Rangelow, Ivo W.

Journal:

Microsystem Technologies

Année:

2014

Langue:

english

Fichier:

PDF, 637 KB

english, 2014

11

Profile evolution of Cr masked features undergoing HBr-inductively coupled plasma etching for use in 25 nm silicon nanoimprint templates

Olynick, Deirdre L., Liddle, J. Alexander, Rangelow, Ivo W.

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Année:

2005

Langue:

english

Fichier:

PDF, 766 KB

english, 2005

12

SPIE Proceedings [SPIE SPIE Scanning Microscopies - Monterey, California, United States (Tuesday 16 September 2014)] Scanning Microscopies 2014 - Shear force microscopy using piezoresistive cantilevers in surface metrology

Postek, Michael T., Newbury, Dale E., Platek, S. Frank, Maugel, Tim K., Gotszalk, Teodor, Kopiec, Daniel, Sierakowski, Andrzej, Janus, Paweł, Grabiec, Piotr, Rangelow, Ivo W.

Année:

2014

Langue:

english

Fichier:

PDF, 729 KB

english, 2014

13

Multi-eigenmode control for high material contrast in bimodal and higher harmonic atomic force microscopy

Schuh, Andreas, Bozchalooi, Iman Soltani, Rangelow, Ivo W, Youcef-Toumi, Kamal

Journal:

Année:

2015

Langue:

english

Fichier:

PDF, 6.22 MB

english, 2015

14

Fabrication of self-actuated piezoresistive thermal probes

Hofer, Manuel, Ivanov, Tzvetan, Rudek, Maciej, Kopiec, Daniel, Guliyev, Elshad, Gotszalk, Teodor P., Rangelow, Ivo W.

Journal:

Microelectronic Engineering

Année:

2015

Langue:

english

Fichier:

PDF, 1.61 MB

english, 2015

15

Improved single ion implantation with scanning probe alignment

Ilg, Michael, Weis, Christoph D., Schwartz, Julian, Persaud, Arun, Ji, Qing, Chi Lo, Cheuk, Bokor, Jeffrey, Hegyi, Alex, Guliyev, Elshad, Rangelow, Ivo W., Schenkel, Thomas

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Année:

2012

Langue:

english

Fichier:

PDF, 1017 KB

english, 2012

16

Fast atomic force microscopy with self-transduced, self-sensing cantilever

Ahmad, Ahmad, Ivanov, Tzvetan, Angelov, Tihomir, Rangelow, Ivo W.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2015

Langue:

english

Fichier:

PDF, 4.68 MB

english, 2015

17

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation

Fantner, Georg E., Burns, Daniel J., Belcher, Angela M., Rangelow, Ivo W., Youcef-Toumi, Kamal

Journal:

Journal of Dynamic Systems Measurement and Control

Année:

2009

Langue:

english

Fichier:

PDF, 908 KB

english, 2009

18

Tip Motion—Sensor Signal Relation for a Composite SPM/SPL Cantilever

Roeser, Dennis, Gutschmidt, Stefanie, Sattel, Thomas, Rangelow, Ivo W.

Journal:

Journal of Microelectromechanical Systems

Année:

2016

Langue:

english

Fichier:

PDF, 3.20 MB

english, 2016

19

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Alternative Lithographic Technologies V - Mix & match electron beam & scanning probe lithography for high throughput sub-10 nm lithography

Kaestner, Marcus, Tong, William M., Resnick, Douglas J., Hofer, Manuel, Rangelow, Ivo W.

Année:

2013

Langue:

english

Fichier:

PDF, 1.82 MB

english, 2013

20

SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Chemically amplified deep UV resists for micromachining

Hudek, Peter, Rangelow, Ivo W., Kostic, Ivan, Grabiec, Piotr B., Shi, Feng, Pang, Stella W., Chang, Shih-Chia

Année:

1996

Langue:

english

Fichier:

PDF, 2.04 MB

english, 1996

21

Low temperature dry etching of chromium towards control at sub-5 nm dimensions

Staaks, Daniel, Yang, XiaoMin, Lee, Kim Y, Dhuey, Scott D, Sassolini, Simone, Rangelow, Ivo W, Olynick, Deirdre L

Journal:

Année:

2016

Langue:

english

Fichier:

PDF, 1.26 MB

english, 2016

22

Six-axis AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nanolithography

Angelov, Tihomir, Ahmad, Ahmad, Guliyev, Elshad, Reum, Alexander, Atanasov, Ivaylo, Ivanov, Tzvetan, Ishchuk, Valentyn, Kaestner, Marcus, Krivoshapkina, Yana, Lenk, Steve, Lenk, Claudia, Rangelow, Ivo

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2016

Langue:

english

Fichier:

PDF, 2.53 MB

english, 2016

23

Magnetoelectric versus thermal actuation characteristics of shear force AFM probes with piezoresistive detection

Sierakowski, Andrzej, Kopiec, Daniel, Majstrzyk, Wojciech, Kunicki, Piotr, Janus, Paweł, Dobrowolski, Rafał, Grabiec, Piotr, Rangelow, Ivo W, Gotszalk, Teodor

Journal:

Measurement Science and Technology

Année:

2017

Langue:

english

Fichier:

PDF, 3.16 MB

english, 2017

24

Simulation of field emission from volcano-gated tips for scanning probe lithography

Lenk, Steve, Kaestner, Marcus, Lenk, Claudia, Rangelow, Ivo W.

Journal:

Microelectronic Engineering

Année:

2017

Langue:

english

Fichier:

PDF, 1.28 MB

english, 2017

25

Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication

Rangelow, Ivo W., Ivanov, Tzvetan, Ahmad, Ahmad, Kaestner, Marcus, Lenk, Claudia, Bozchalooi, Iman S., Xia, Fangzhou, Youcef-Toumi, Kamal, Holz, Mathias, Reum, Alexander

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2017

Langue:

english

Fichier:

PDF, 5.07 MB

english, 2017

26

Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy

Rangelow, Ivo W., Kaestner, Marcus, Ivanov, Tzvetan, Ahmad, Ahmad, Lenk, Steve, Lenk, Claudia, Guliyev, Elshad, Reum, Alexander, Hofmann, Martin, Reuter, Christoph, Holz, Mathias

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2018

Langue:

english

Fichier:

PDF, 3.58 MB

english, 2018

27

Charged particle single nanometre manufacturing

Prewett, Philip D, Hagen, Cornelis W, Lenk, Claudia, Lenk, Steve, Kaestner, Marcus, Ivanov, Tzvetan, Ahmad, Ahmad, Rangelow, Ivo W, Shi, Xiaoqing, Boden, Stuart A, Robinson, Alex P G, Yang, Dongxu, Ha

Journal:

Beilstein Journal of Nanotechnology

Année:

2018

Langue:

english

Fichier:

PDF, 7.99 MB

english, 2018

28

Atomic layer etching of SiO 2 with Ar and CHF 3 plasmas: A self‐limiting process for aspect ratio independent etching

Dallorto, Stefano, Goodyear, Andy, Cooke, Mike, Szornel, Julia E., Ward, Craig, Kastl, Christoph, Schwartzberg, Adam, Rangelow, Ivo W., Cabrini, Stefano

Journal:

Plasma Processes and Polymers

Année:

2019

Langue:

english

Fichier:

PDF, 2.04 MB

english, 2019

29

Tip-based nano-manufacturing and -metrology

Gotszalk, Teodor, Jóźwiak, Grzegorz, Radojewski, Jacek, Fröhlich, Thomas, Füssl, Roland, Manske, Eberhard, Holz, Mathias, Ivanov, Tzvetan, Ahmad, Ahmad, Rangelow, Ivo W.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2019

Langue:

english

Fichier:

PDF, 2.96 MB

english, 2019

30

Tip-based nano-manufacturing and -metrology

Gotszalk, Teodor, Jóźwiak, Grzegorz, Radojewski, Jacek, Fröhlich, Thomas, Füssl, Roland, Manske, Eberhard, Holz, Mathias, Ivanov, Tzvetan, Ahmad, Ahmad, Rangelow, Ivo W.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2019

Fichier:

PDF, 2.96 MB

2019

31

ChemInform Abstract: Gas-Sensitive Properties of Nitrogen-Rich Carbon Nitride Films.

Ludmil M. Zambov, Cyril Popov, Nikolai Abedinov, Martin F. Plass, Wilhelm Kulisch, Teodor Gotszalk, Peter Grabiec, Ivo W. Rangelow, Rainer Kassing

Journal:

Année:

2000

Fichier:

PDF, 28 KB

2000

32

Scanning proximity probes for nanoscience and nanofabrication

Ivo W. Rangelow

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 515 KB

english, 2006

33

Hierarchical interconnections in the nano-composite material bone: Fibrillar cross-links resist fracture on several length scales

Georg E. Fantner, Olexandr Rabinovych, Georg Schitter, Philipp Thurner, Johannes H. Kindt, Marquesa M. Finch, James C. Weaver, Laura S. Golde, Daniel E. Morse, Everett A. Lipman, Ivo W. Rangelow, Paul

Journal:

Composites Science and Technology

Année:

2006

Langue:

english

Fichier:

PDF, 590 KB

english, 2006

34

Nano-line width control and standards using Lateral Pattern Definition technique

Michał Zaborowski, Dariusz Szmigiel, Teodor Gotszalk, Katerina Ivanova, Yanko Sarov, Tzvetan Ivanov, Burkhard E. Volland, Ivo W. Rangelow, Piotr Grabiec

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 280 KB

english, 2006

35

Dry etching-based silicon micro-machining for MEMS

Ivo W. Rangelow

Journal:

Année:

2001

Langue:

english

Fichier:

PDF, 537 KB

english, 2001

36

Calibration and examination of piezoresistive Wheatstone bridge cantilevers for scanning probe microscopy

Teodor Gotszalk, Piotr Grabiec, Ivo W. Rangelow

Journal:

Ultramicroscopy

Année:

2003

Langue:

english

Fichier:

PDF, 400 KB

english, 2003

37

Piezoresistive sensors for scanning probe microscopy

Teodor Gotszalk, Piotr Grabiec, Ivo W. Rangelow

Journal:

Ultramicroscopy

Année:

2000

Langue:

english

Fichier:

PDF, 1011 KB

english, 2000

38

Inverse microemulsion copolymerization of butyl acrylate and acrylamide: kinetics, colloidal parameters and some model applications

Ufuk Yildiz, Ignác Capek, Dušan Berek, Yanko Sarov, Ivo W Rangelow

Journal:

Polymer International

Année:

2007

Langue:

english

Fichier:

PDF, 153 KB

english, 2007

39

Nanoscale Engineering and Optical Addressing of Single Spins in Diamond

Sébastien Pezzagna, Dominik Wildanger, Paul Mazarov, Andreas D. Wieck, Yanko Sarov, Ivo Rangelow, Boris Naydenov, Fedor Jelezko, Stefan W. Hell, Jan Meijer

Journal:

Année:

2010

Langue:

english

Fichier:

PDF, 641 KB

english, 2010

40

Thermally driven microgripper as a tool for micro assembly

Katerina Ivanova, Tzvetan Ivanov, Ali Badar, Burkhard E. Volland, Ivo W. Rangelow, Daniela Andrijasevic, Franz Sümecz, Stephanie Fischer, Manfred Spitzbart, Werner Brenner, Ivan Kostic

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 197 KB

english, 2006

41

Gated field emitter arrays

Tomasz Debski, Wolfgang Barth, Ivo W. Rangelow, Steffen Biehl, Piotr Grabiec, I.I. Bekh, A.E. Lushkin, L.G. Il’chenko, V.V. Il’chenko, Ivan Kostic, Peter Hudek, Stanislaw Mitura

Journal:

Microelectronic Engineering

Année:

2001

Langue:

english

Fichier:

PDF, 778 KB

english, 2001

42

The influence of reactant transport on the profiles of gas chopping etching processes: a simulation approach

Burkhard E. Volland, Ivo W. Rangelow

Journal:

Microelectronic Engineering

Année:

2003

Langue:

english

Fichier:

PDF, 475 KB

english, 2003

43

Charging effect simulation model used in simulations of plasma etching of silicon

Ishchuk, Valentyn, Volland, Burkhard E., Hauguth, Maik, Cooke, Mike, Rangelow, Ivo W.

Journal:

Journal of Applied Physics

Année:

2012

Langue:

english

Fichier:

PDF, 2.80 MB

english, 2012

44

Microemulsion Polymerization of Butyl Acrylate under Ultrasound Irradiation

Capek, Ignác, Janícková, Silvia, Donescu, Dan, Sarov, Yanko, Rangelow, Ivo W

Journal:

Polymer Journal

Année:

2006

Langue:

english

Fichier:

PDF, 168 KB

english, 2006

45

SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microlithography and Metrology in Micromachining II - Cantilever with integrated Wheatstone bridge piezoresistive deflection sensor: analysis of force interaction measurement sensitivity

Gotszalk, Teodor, Rangelow, Ivo W., Dumania, Piotr, Grabiec, Piotr B., Postek, Jr., Michael T., Friedrich, Craig R.

Année:

1996

Langue:

english

Fichier:

PDF, 451 KB

english, 1996

46

Critical tasks in high aspect ratio silicon dry etching for microelectromechanical systems

Rangelow, Ivo W.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

2003

Langue:

english

Fichier:

PDF, 2.11 MB

english, 2003

47

Review of scanning probe micromachining and its applications within nanoscience

Michels, Thomas, Rangelow, Ivo W.

Journal:

Microelectronic Engineering

Année:

2014

Langue:

english

Fichier:

PDF, 2.70 MB

english, 2014

48

Encased Cantilevers and Alternative Scan Algorithms for Ultra-Gantle High Speed Atomic Force Microscopy

Ashby, Paul, Ziegler, Dominik, Frank, Andreas, Frank, Sindy, Chen, Alex, Meyer, Travis, Farnham, Rodrigo, Huynh, Nen, Rangelow, Ivo, Chang, Jen-Mei, Bertozzi, Andrea

Journal:

Biophysical Journal

Année:

2012

Langue:

english

Fichier:

PDF, 60 KB

english, 2012

49

Micromachined self-actuated piezoresistive cantilever for high speed SPM

Michels, Thomas, Guliyev, Elshad, Klukowski, Michal, W. Rangelow, Ivo

Journal:

Microelectronic Engineering

Année:

2012

Langue:

english

Fichier:

PDF, 673 KB

english, 2012

50

Irregular film thickness distribution in C4F8 inductively coupled plasma polymer deposition

Volland, Burkhard E., Hauguth, Maik, Ishchuk, Valentyn, Rangelow, Ivo W., Goodyear, Andrew L.

Journal:

Microelectronic Engineering

Année:

2012

Langue:

english

Fichier:

PDF, 372 KB

english, 2012